Nondestructive determination of plasma processing treatment characteristics.

摘要

Plasma processing treatment characteristics of an object (32) are determined nondestructively, prior to plasma processing the object (32), by placing an indicator structure (38) over at least a portion of the plasma processing surface (36) of the object (32), so as to generally conform to the shape of the surface (36). The indicator structure (38) is implanted and changes properties responsive to the plasma processing treatment. The implanted indicator structure (38) is thereafter analyzed to determine the treatment characteristics of the indicator structure (38). Plasma processing spatial distribution and total dosage are determined nondestructively from this information and used to establish the plasma processing program for the object (32) and to adjust the plasma processing system (20) as needed. <IMAGE>