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发明名称
Apparatus for microwave processing in a magnetic field.
摘要
申请公布号
EP0402867(B1)
申请公布日期
1995.03.01
申请号
EP19900111110
申请日期
1990.06.12
申请人
SEL SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
发明人
YAMAZAKI, SHUNPEI;HIROSE, NAOKI;KADONO, MASAYA;ISHIDA, NORIYA;ITO, KENJI;TAKAYAMA, TORU;ARAI, YASUYUKI
分类号
H01J37/32;(IPC1-7):H01J37/32;H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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