| 摘要 |
<p>A pressure sensor 10 using a vibrator 11 as a pressure detection means is disclosed. The vibrator 11 includes a diaphragm valve 12. On both principal planes of the diaphragm valve 12, circular piezoelectric bodies 14a and 14b are formed respectively. On one principal plane of the piezoelectric body 14a, a first circular electrode 18a is formed. On one principal plane of the piezoelectric body 14a, a second hollow circular electrode 18b is formed outside the first electrode 18a. On one principal plane of the piezoelectric body 14b, a third circular electrode 20a is formed opposing to the first electrode 18a. On one principal plane of the piezoelectric body 14b, a fourth hollow circular electrode 20b is formed outside the third electrode 20a, opposing to the second electrode 18b. In the diaphragm valve 12, an inside circular portion 12a interposed between the first electrode 18a and the third electrode 20a and an outside circular portion 12b interposed between the second electrode 18b and the fourth electrode 20b vibrate radially in such a manner that they expand and contract in the reverse directions. <IMAGE></p> |
