| 摘要 |
PURPOSE: To provide a process for independently controlling permeability and selectively of carbon thin membranes by narrowing and reopening the pore of the carbon thin membranes under a controlled condition. CONSTITUTION: A pyrolyzable carbon-contg. gas is contacted with a carbon thin membranes having a pore size and/or distribution larger than the desired pore size and/or a distribution, the ambient temp. of the thin membranes is raised above the temp. at which the adsorbed carbon-contg. gas pyrolyzes, and the carbon-contg. gas is substantially purged from the atmosphere surrounding the membranes and the thin membranes are cooled. Further the pores of the membranes are enlarged, if necessary, by partially sintering in the presence of an oxidant, and permeability and selectivity of the thin membranes are examined at a time and temp. optionally selected. According to demand, the above process is repeated. The size of chemical vapor deposition(CVD) substance, according to the desired adsorption style, can be selected so as to allow or prevent impregnation into the pore of the membrane.
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