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发明名称
WASHER
摘要
申请公布号
JPH0751643(A)
申请公布日期
1995.02.28
申请号
JP19930326709
申请日期
1993.12.24
申请人
SHARP CORP
发明人
AKAHA TATSUO;FUJITO SHIGEO;ONO HITOSHI;MIZOKOSHI YASUO;UENO SHIGERU;OKAMOTO TADASHI;DOI HIROSHI
分类号
B01J19/10;B08B3/10;B08B3/12;H01L21/304;H05K3/26;(IPC1-7):B08B3/10
主分类号
B01J19/10
代理机构
代理人
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