Semiconductor memory device containing junction field effect transistor

摘要

The miniaturization of junction field effect transistors constituting memory cells and higher integration of a dynamic semiconductor memory device are attained. Word lines composed of a p-type impurity diffusion layer are formed on an n-type silicon substrate. An n-type impurity diffusion layer is formed within the p-type impurity diffusion layer. The n-type impurity diffusion layer constitutes two source-drain regions and a channel region, and the p-type impurity diffusion layer constitutes a gate region in each junction field effect transistor. The diffusion layer depth of the channel region is less than that of the source-drain regions. Bit lines are connected to one source-drain region, and storage nodes are connected to the other source-drain region. Each capacitor is made of a storage node, a dielectric film and a cell plate electrode.