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发明名称
METHOD OF SEMICONDUCTOR VAPOR PHASE GROWTH AND DEVICE THEREOF
摘要
申请公布号
KR950001751(B1)
申请公布日期
1995.02.28
申请号
KR19910004323
申请日期
1991.03.19
申请人
TOSHIBA CO., LTD.
发明人
KUBOTA, HIROYASU
分类号
H01L21/205;C23C16/02;C23C16/44;C23C16/455;C23C16/458;C30B25/02;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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