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经营范围
发明名称
CVD DEVICE
摘要
申请公布号
JPH0754153(A)
申请公布日期
1995.02.28
申请号
JP19930217035
申请日期
1993.08.09
申请人
HITACHI ELECTRON ENG CO LTD;HITACHI LTD
发明人
ARAI HISAHIRO;SATO EIJI;NAGASAKI KEIICHI;HONMA YOSHIO;SAITO MASAYOSHI;NAKANISHI SHIGEHIKO
分类号
C23C16/44;C23C16/455;C23C16/50;H01L21/205;(IPC1-7):C23C16/50
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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