| 摘要 |
<p>PURPOSE:To provide an ozone generator which prevents the infiltration of moisture into the device during shutdown, is low in running cost and has high reliability. CONSTITUTION:This ozone generator is constituted to supply air from a fan 1 for an air source via an air drying device 2 consisting of air coolers 4, 5 and an adsorption column 6 to the ozone generator 3. The ozone generator is composed of automatic valves 10, 11 which are disposed in the inlet and outlet of the adsorption column 6 and hermentically closes this adsorption column 6 at the time of stopping the ozone generator, automatic valves 12, 13 which are disposed in the inlet and outlet of the ozone generator 3 respectively, a vent valve 16 which releases the dry air emitted from the air drying device 2 without passing the air through the ozone generator 3, a fan 17 for regeneration which sends air of only the quality necessary for regeneration of an adsorbent, selector valves 18, 19 which are operated by this fan for regeneration at the time of regenerating and purging the adsorption column 6 alone and are disposed in the inlet of a regenerating heater 9 and the outlet for the regenerating air so as to change the destination for blasting at the time of purging and dew point measuring instruments 14, 15 which are disposed in the outlet of the air drying device 2 and the outlet of the ozone generator 3.</p> |
