Verfahren und Einrichtung zur Ablagerung von Antireflektionsschichten und zur Kontrolle ihrer Dicke.,申请号DE19916006612-传众专利搜索

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发明名称	Verfahren und Einrichtung zur Ablagerung von Antireflektionsschichten und zur Kontrolle ihrer Dicke.
摘要
申请公布号	DE69106612(D1)	申请公布日期	1995.02.23
申请号	DE19916006612	申请日期	1991.07.11
申请人	FRANCE TELECOM, ISSY LES MOULINEAUX, FR	发明人	LANDREAU, JEAN, F-92160 ANTONY, FR;NAKAJIMA, HISAO, F-75014 PARIS, FR
分类号	C03C17/00;C23C14/54;G02B1/11;H01L21/66;H01S3/10;H01S5/00;H01S5/028;(IPC1-7):G02B1/10;H01S3/025	主分类号	C03C17/00
代理机构		代理人
主权项
地址

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