| 摘要 |
PURPOSE:To stabilize a discharge and improve the efficiency of a laser oscillation by a method wherein preliminary circuits connect a control switch side pulse circuit with preliminary ionizing electrodes. CONSTITUTION:When a switch 3 is closed, a capacitor C1 is charged and a charging current (i2) flows to a capacitor C2. A charged voltage (v2) and the charging current (i2) show the characteristics as given in figures (a) and (b). The charging current (i2) flows to preliminary ionizing electrodes 12 and 13 in a discharge chamber 10 through preliminary circuits 10A and 10B to create an arc discharge between the electrodes 12 and 13, produce ultraviolet rays, and make plasma in the discharge chamber 10 uniform. The discharge chamber 10 is filled with gaseous medium. Further, the charging current flows to a capacitor C3 and a capacitor C4 and charged voltages (v3) and (v4) show the characteristics as given in figures (c) and (d) and a main discharge current (i0) as given in figure (e) flows to main electrodes 11A and 11B and a uniform glow discharge is generated between the main electrodes 11A and 11B. |
