| 摘要 |
<p>PURPOSE:To align an orientation flat at a low cost and in a space-saving manner by providing a guide in which a curved guide surface to guide a wafer is formed in such a way that the wafer is turned with a belt on an idle pulley and by installing more than one actuators with which the idle pulley and the guide are raised and lowered. CONSTITUTION:A round belt 13 which is raised with an idle pulley 15 comes into contact with the under surface of a wafer 1, and the wafer 1 is tilted in relation to a guide rail 4. Because another round belt 14 is detached from the under surface of the wafer 1, the wafer 1 is turned by the frictional force of the round belt 13 while it is being pushed to a curved guide surface 51 at a stopper 5, and an orientation flat 11 is fitted to the guide rail 4. As soon as an orientation-flat sensor detects that the orientation flat 11 is fitted to the guide rail 4, an actuator 17 is set in motion, and the guide pulley 15 and the stopper 5 are lowered. The wafer 1 is lowered on the belt 13 and the belt 14, and is then transported to a posterior process by means of both belts 13, 14 in such a way that the orientation flat 11 has been aligned in parallel with the guide rail 4.</p> |
