| 摘要 |
Volatile complex compounds of the general formula M[O-CR<1>R<2>-CH2-O-CH3]n, in which R<1> and R<2> independently of one another are methyl or a completely fluorinated alkyl group having 1 to 9 C atoms, M is a metal or semimetal of the groups 1, 2 or 4 to 15 of the Periodic Table of the Elements or uranium or thorium and the valency n of the metal or semimetal is 1, 2, 3 or 4, are prepared by reacting beta -ether alcohols of the general formula HO-CR<1>R<2>-CH2OCH3 with homoleptic metal amides in an aprotic organic solvent. The invention also relates to the use of the complex compounds as molecular precursors for the gas phase deposition of metals and metal oxides. <IMAGE> |
