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发明名称
METHOD OF PLASMA ETCHING OF THIN FILMS
摘要
申请公布号
RU2029411(C1)
申请公布日期
1995.02.20
申请号
SU19925045678
申请日期
1992.04.29
申请人
NAUCHNO-PROIZVODSTVENNAYA FIRMA "PLAZMATEK"
发明人
KHODACHENKO GEORGIJ V;FETISOV IGOR K;MOZGRIN DMITRIJ V;SHELYKHMANOV EVGENIJ F;GALPERIN VYACHESLAV A;NEVZOROV PETR I
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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