发明名称 Vorrichtung zur Vermeidung der Drahtschwingung in einem Einkristallziehapparat.
摘要 A wire vibration prevention mechanism for a Czochralski-type single crystal pulling apparatus comprises one or more wire braces (25, 26) for restricting the wire (16) to moving only in the vertical direction, and as many drive means (23, 24) as there are wire braces (25, 26) for horizontally displacing the respective wire braces.
申请公布号 DE69010752(T2) 申请公布日期 1995.02.16
申请号 DE1990610752T 申请日期 1990.04.18
申请人 SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP 发明人 MIZUISHI, KOJI, ANNAKA-SHI, GUNMA-KEN, JP;HARADA, ISAMU, ANNAKA-SHI, GUNMA-KEN, JP;NAKAMURA, YASUSHI, TOMIOKA-SHI, GUNMA-KEN, JP;ODA, MICHIAKI, ANNAKA-SHI, GUNMA-KEN, JP;OHTSUKA, SEIICHIRO, TOMIOKA-SHI GUNMA-KEN, JP;HIRANO, YOSHIHIRO, ANNAKA-SHI GUNMA-KEN, JP;URANO, MASAHIKO, TAKASAKI-SHI GUNMA-KEN, JP
分类号 C30B15/20;C30B15/30;(IPC1-7):C30B15/30 主分类号 C30B15/20
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