申请人 |
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP |
发明人 |
MIZUISHI, KOJI, ANNAKA-SHI, GUNMA-KEN, JP;HARADA, ISAMU, ANNAKA-SHI, GUNMA-KEN, JP;NAKAMURA, YASUSHI, TOMIOKA-SHI, GUNMA-KEN, JP;ODA, MICHIAKI, ANNAKA-SHI, GUNMA-KEN, JP;OHTSUKA, SEIICHIRO, TOMIOKA-SHI GUNMA-KEN, JP;HIRANO, YOSHIHIRO, ANNAKA-SHI GUNMA-KEN, JP;URANO, MASAHIKO, TAKASAKI-SHI GUNMA-KEN, JP |