Verfahren zur Herstellung eines kohlenstoffhaltigen Films.,申请号DE19896020417-传众专利搜索

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发明名称	Verfahren zur Herstellung eines kohlenstoffhaltigen Films.
摘要
申请公布号	DE68920417(D1)	申请公布日期	1995.02.16
申请号	DE19896020417	申请日期	1989.10.10
申请人	SEMICONDUCTOR ENERGY LABORATORY CO., LTD., ATSUGI, KANAGAWA, JP	发明人	YAMAZAKI, SHUNPEI, TOKYO, 157, JP;HAYASHI, SHIGENORI, ATSUGI-SHI KANAGAWA-KEN, 243, JP;ISHIDA, NORIYA, ATSUGI-SHI KANAGAWA-KEN, 243, JP;SASAKI, MARI, ATSUGI-SHI KANAGAWA-KEN, 243, JP;TAKEYAMA, JUNICHI, ATSUGI-SHI KANAGAWA-KEN, 243, JP;ITOU, KENJI, ZAMA-SHI KANAGAWA-KEN, 228, JP;KOJIMA, MASAHIRO, ATSUGI-SHI KANAGAWA-KEN, 243-02, JP;KADONO, MASAYA, ATSUGI-SHI KANAGAWA-KEN, 243, JP
分类号	C23C16/26;C23C16/34;(IPC1-7):C23C16/26	主分类号	C23C16/26
代理机构		代理人
主权项
地址

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