| 发明名称 |
Sputter-coating target and method of use. |
| 摘要 |
<p>A sputter coating target which alleviates the need for anode reconditioning due to a buildup of a nonconductive coating comprises a coating component which itself or its reactive product is substantially electrically nonconductive and a dopant component which itself or its reactive product is substantially electrically conductive. <IMAGE></p> |
| 申请公布号 |
EP0638659(A2) |
申请公布日期 |
1995.02.15 |
| 申请号 |
EP19940112207 |
申请日期 |
1994.08.04 |
| 申请人 |
GUARDIAN INDUSTRIES CORP. |
发明人 |
HARTIG, KLAUS W.;LINGLE, PHILIP J. |
| 分类号 |
C23C14/34;C23C14/56;(IPC1-7):C23C14/34;C23C14/00 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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