Temperature-sensitive resistor and its production process.

摘要

The invention belongs to physics sphere and can be used in the control equipment for temperature measurement and also in temperature-sensitive resistor production itself. The problem, which is solved by the applied invention is the creation of a film temperature-sensitive resistor which provides the accuracy of the results, the high speed of response, the stability and the reliability, and also the creation of its production process allowing for "spare" regimes concerning the transducer elements. Temperature-sensitive resistor containts the dielectric substrate 1, the film sensing element 2 in a meander form with the contact outputs 3 and 4 and the protective dielectric coating 5. The sensing element 2 is freely spaced in a groove 6 of a dielectric substrate 1 without any interaction with the walls. The tight cavity 7, formed by the groove 6 and the coating 5 is filled by an inert gas. In production of the temperature-sensitive resistor the groove 6 first is fulfilled in a dielectric substrate 1, next the sensing element 2 is spaced in it and the protective dielectric coating 5 is applied with a simultaneous packing of a formed tight cavity 7 with an inert gas. <IMAGE>