| 摘要 |
PURPOSE:To produce a threshold current type oxygen sensor in a mass by easily forming a porous electrode thin film with gas transmission property on an ion conductor thin film with an fine surface. CONSTITUTION:A porous first electrode thin film 4 which does not prevent the circulation of gas is formed on one surface of a porous substrate 1 with vapor permeability by sputtering, then an ion conductor thin film 3 is formed on the first electrode thin film 4 by sputtering, and further methaloorganic paste is applied and baked onto the ion conductor thin film 3, thus forming a porous second electrode thin film 2 where gas circulates. |
