Resist composition comprising a siloxane or silsesquioxane polymer having silanol groups in a composition with a naphthoquinone compound

摘要

A resist composition comprising a compound having an active hydrogen and an alkali-soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula (I) and a unit represented by formula (II) e the same or different and each represents one member selected from the group consisting of hydrogen, <IMAGE> (where R represents hydrogen, a hydrocarbon group, or a substituted hydrocarbon group); and a carboxyl group; R1, R2, R3, R4, R5, and R6 are the same or different and each represents one member selected from the group consisting of hydrogen, a hydroxyl group, a substituted or unsubstituted aliphatic hydrocarbon group, and a substituted or unsubstituted aromatic hydrocarbon group, provided that at least one of R1 to R6 is a hydroxyl group; and l, m, n, and p each is 0 or a positive integer, provided that l and m are not 0 at the same time.