发明名称 Method and apparatus for near-field, scanning, optical microscopy by reflective, optical feedback
摘要 Apparatus and methods of near-field scanning optical microscopy (NSOM) are described. A sensing technique is used, in which a light source having an optical cavity is reflectively coupled to the sample surface. Changes in the surface properties of the sample at the sensed location alter the optical feedback in the light source. This leads to detectable changes in the output characteristics of the light source.
申请公布号 US5389779(A) 申请公布日期 1995.02.14
申请号 US19930099681 申请日期 1993.07.29
申请人 AT&T CORP. 发明人 BETZIG, ROBERT E.;BRENER, IGAL M.;GRUBB, STEPHEN G.;MILLER, DAVID A. B.
分类号 G01B11/30;G01N37/00;G01Q60/18;G01Q60/20;G01Q60/22;G11B7/12;G11B7/135;G11B11/105;(IPC1-7):H01J3/14 主分类号 G01B11/30
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