| 摘要 |
A process for formation of an LDD transistor and a structure thereof are disclosed in which the junction capacitance and the body effect can be properly reduced. In the conventional LDD transistors, the punch-through problem is serious, and the improved conventional LDD transistor also, there is a limit in increasing the channel concentration, as well as the body effect being increased. The present invention gives solutions to the above problems by arranging that the junction thicknesses of n+ source and drain become smaller than the junction thicknesses of n- regions, and that a p type pocket 6 be formed only near a gate and a p type pocket 6.
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