发明名称 Method of making narrow metal electrode
摘要 A method for producing a linear pattern having a width less than 100 microns and a resistivity of the order of 10-6 OMEGA xcm on a substrate includes maintaining a low melting point metal in a fused state, applying the fused metal to a tip of a drawing head disposed close to or in contact with a substrate by capillary action, applying the fused metal to the substrate in a line with a width less than 100 microns while moving the tip of the drawing head relative to the substrate, and cooling and solidifying the fused metal as a linear pattern on the substrate.
申请公布号 US5389573(A) 申请公布日期 1995.02.14
申请号 US19940215478 申请日期 1994.03.21
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 ITAGAKI, TAKUSHI
分类号 H01B13/00;H01L21/288;H01L31/0224;H01L31/04;H05K3/10;H05K3/12;(IPC1-7):H01L31/18 主分类号 H01B13/00
代理机构 代理人
主权项
地址