CONVERGENT ION BEAM EQUIPMENT,申请号JP19930190260-传众专利搜索

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发明名称	CONVERGENT ION BEAM EQUIPMENT
摘要
申请公布号	JPH0745522(A)	申请公布日期	1995.02.14
申请号	JP19930190260	申请日期	1993.07.30
申请人	SHIMADZU CORP	发明人	NAGAMACHI SHINJI
分类号	H01J37/08;H01J37/30;H01L21/203;H01L21/265;H01L21/285;(IPC1-7):H01L21/203	主分类号	H01J37/08
代理机构		代理人
主权项
地址

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