发明名称 Wire clamper
摘要 A wire clamper for wire bonding apparatuses including a pair of clamping arms provided with clamping elements at the terminal ends of the clamping arms that are opened and closed by the electrostrictive strain effect or magnetstrictive strain effect of a piezoelectric element, and a temperature compensation component is connected to the piezoelectric element so as to correct the fluctuation in the clamping load in the clamping elements that are caused by temperature changes in the clamper.
申请公布号 US5388751(A) 申请公布日期 1995.02.14
申请号 US19940190308 申请日期 1994.02.02
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 HARADA, KOUICHI;TAKAHASHI, KUNIYUKI
分类号 H01L21/60;B23K20/00;H01L21/00;H01L41/09;(IPC1-7):H01L21/60 主分类号 H01L21/60
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