METHOD FOR CONTROLLING ETCHING OF FET HAVING RECESS STRUCTURE,申请号JP19930158766-传众专利搜索

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发明名称	METHOD FOR CONTROLLING ETCHING OF FET HAVING RECESS STRUCTURE
摘要
申请公布号	JPH0745633(A)	申请公布日期	1995.02.14
申请号	JP19930158766	申请日期	1993.06.29
申请人	OKI ELECTRIC IND CO LTD	发明人	SAITO TADASHI
分类号	H01L21/306;H01L21/338;H01L21/66;H01L29/812;(IPC1-7):H01L21/338	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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