| 摘要 |
PURPOSE:To provide an extremely small-sized angle speed sensor which requires no trimming work such as laser or ultraviolet emission, and has satisfactory detecting sensitivity. CONSTITUTION:A vibrating beam 10 both ends of which are fixed is formed on a silicone base 1. A cavity 3 is provided in one-side base area 18 of the fixed beam ends of the vibrating beam 10. A cavity width regulating means 20 for variably regulating the width of the cavity 3 in the direction orthogonal to the vibrating direction of the vibrating beam 10 is provided on the base area 18. By regulating the cavity width, the cavity frequency is regulated to the resonance frequency of the vibrating beam 10. Thus, angle speed can be sensitively and precisely detected without causing an unevenness between sensors. |
