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发明名称
GO GAGE
摘要
申请公布号
JPH0739823(A)
申请公布日期
1995.02.10
申请号
JP19930204539
申请日期
1993.07.27
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD;HITACHI SHONAN DENSHI CO LTD
发明人
MORIGUCHI HIROSHI;ISHIZU AKIO;IDA TSUTOMU;SAITO MAKOTO
分类号
B07C5/06;G01R31/26;H01L21/66;(IPC1-7):B07C5/06
主分类号
B07C5/06
代理机构
代理人
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