发明名称 METHOD FOR ETCHING METAL SURFACE
摘要 PURPOSE:To drastically reduce the cost of a resist and to prevent environmental pollution from occurring by forming a resist of specified pattern on the surface of a metal, etching the metal.and recycling the resist. CONSTITUTION:A coiled metallic sheet is rewound by a payoff reel 1 and introduced into a resist printer 5 through an inlet-side looper 3, and a resist (paraffin wax, etc.) to prevent contact with an etchant is deposited on the sheet surface in a specified pattern, cooled by a cooler 6, solidified and firmly attached to the sheet. The sheet is then introduced into an electrolytic etching tank 7, etched by direct energization and then introduced into a resist removal tank 8. The resist is dipped in hot water, melted with steam and floated up on the hot water, water is sprayed to solidify the resist, and the solidified resist is recovered in a recover treatment device 9 and recycled. The sheet freed from the resist is wound on a tension reel 2 through an out-side looper 4. Consequently, about 80% of the resist is recovered, and the cost is drastically reduced.
申请公布号 JPH0742000(A) 申请公布日期 1995.02.10
申请号 JP19930190330 申请日期 1993.07.30
申请人 KAWASAKI STEEL CORP 发明人 IWATANI AKIYUKI;NAOI TAKAYUKI
分类号 C23F1/00;C25F3/14;H01L21/306 主分类号 C23F1/00
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