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发明名称
JIG FOR SUBSTRATE END SURFACE POLISHING
摘要
申请公布号
JPH0740212(A)
申请公布日期
1995.02.10
申请号
JP19930205796
申请日期
1993.07.28
申请人
ANDO ELECTRIC CO LTD
发明人
KATO TAIJI
分类号
B24B7/16;H01L21/304;(IPC1-7):B24B7/16
主分类号
B24B7/16
代理机构
代理人
主权项
地址
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