| 摘要 |
TITLE High S/N Ratio Optical Detection Apparatus and Method An optical photodetection apparatus for glass surface defect photodetection includes a source for directing light, as an incident beam thereof against a glass surface target, which source is selected to emit light at wavelengths substantially overlapping a target-glass-absorbed bandwidth. The apparatus further includes a first optical polarizer for polarizing light emitted from the source, such that the first optical polarizer passes a resultant, polarized, incident beam against a target glass surface. The detector comprises an at least one silicon photodetector, and further includes a second optical polarizer arranged in cross-polarized relation to the first optical polarizer. The detector is aligned in defect-scattered light beam detecting relation relative to the incident beam, preferably at an angle in the Brewster range, and is operable to generate a detected signal in response to light scattered through defects in said target surface.
|
