INSTALLATION METHOD OF FAN FILTER UNIT

摘要

PURPOSE:To provide an installation method of a fan filter unit(FFU) which achieve higher working efficiency, improvement in safety and a shortening of installation term. CONSTITUTION:Ceiling 3 of a clean room 1 is formed while a ceiling frame 5 is assembled on the earth to carry a plurality of fan filter units 4. The fan filter units 4 are carried on a ceiling frame 5 to form a FFU-carried ceiling frame 22 which has the ceiling frame 5 and the plurality of the fan filter units 4 integrated. The FFU-carried ceiling frame 22 is hoisted to a ceiling part with a hoisting machine 20 to mount the FFU-carried ceiling frame 22 on a rack 9 provided on the ceiling part.