发明名称 Lichtempfindliche Zusammensetzungen.
摘要 <p>A light-sensitive composition comprising: (a) a polysiloxane compound having at least 1 mol% of a structural unit derived from a product of a thermal cycloaddition reaction between a compound of formula (I), (II), (III) or (IV) and a compound of formula (V), (VI), (VII) or (VIII), and (b) an orthoquinonediazide compound. <CHEM></p>
申请公布号 DE69012475(T2) 申请公布日期 1995.02.09
申请号 DE1990612475T 申请日期 1990.07.26
申请人 FUJI PHOTO FILM CO., LTD., MINAMI-ASHIGARA, KANAGAWA, JP 发明人 MIZUTANI, KAZUYOSHI, C/O FUJI PHOTO FILM CO.,LTD., HAIBARA-GUN, SHIZUOKA-KEN, JP;AOAI, TOSHIAKI, C/O FUJI PHOTO FILM CO., LTD., HAIBARA-GUN, SHIZUOKA-KEN, JP
分类号 G03F7/022;C09D11/03;C09D11/10;C09D11/102;G03F7/075;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G03F7/075 主分类号 G03F7/022
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