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发明名称
Vorrichtung und Verfahren zum Herstellen von Dünnschichten
摘要
申请公布号
DE4218671(C2)
申请公布日期
1995.02.09
申请号
DE19924218671
申请日期
1992.06.05
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
TSUKAZAKI, HISASHI, AMAGASAKI, HYOGO, JP;YAMANISHI, KEN-ICHIRO, AMAGASAKI, HYOGO, JP
分类号
C23C14/30;C23C14/22;C23C14/32;C23C14/54;H01L21/203;H01L21/285;(IPC1-7):C23C14/32;H01B12/00
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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