| 摘要 |
<p>PURPOSE:To treat NF3 effectively by reacting gas containing NF3 with carbon lumps such as activated carbon, charcoal, etc. in a temperature of 300-600 deg.C and turning the same into CF4 gas and N2 gas having no toxicity. CONSTITUTION:Gas containing NF3 is supplied from an inlet 10 into a reaction cylinder 4 through a valve 11, an oil separator 12, a three-way directional control valve 13, reacts with carbon lumps such as activated carbon, charcoal and the like to turn into CF4 and N2 and is exhausted through a cooling coil 14 and valves 15 and 16. When temperature rises up, an air action valve 22 is closed automatically and a bypass air action valve 23 is opened to exhaust gas containing NF3 through a circuit 24, to open an emergency inactive gas supply valve 26 and lower the temperature in the cylinder purging the reaction cylinder 4.</p> |
