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经营范围
发明名称
Vorrichtung für den Transport von Substraten.
摘要
申请公布号
DE59104044(D1)
申请公布日期
1995.02.09
申请号
DE19915004044
申请日期
1991.03.14
申请人
LEYBOLD AG, 63450 HANAU, DE
发明人
MAHLER, PETER, W-6452 HAINBURG 2, DE;MICHAEL, KLAUS, DR., W-6460 GELNHAUSEN, DE;GEGENWART, RAINER, DR., W-6074 ROEDERMARK, DE;SCHERER, MICHAEL, DR., W-6458 RODENBACH, DE
分类号
C23C14/50;C23C14/54;(IPC1-7):C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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