发明名称 Semiconductor device and process for production thereof.
摘要 A semiconductor device having an interconnecting line of aluminum containing a predetermined additive element, wherein a segregate layer of the additive element is formed along aluminum grain boundaries in the interconnecting line on the basis of a heat treatment after the formation of the interconnecting line. <IMAGE>
申请公布号 EP0606761(A3) 申请公布日期 1995.02.08
申请号 EP19930310511 申请日期 1993.12.23
申请人 KAWASAKI STEEL CO 发明人 NEMOTO TAKENAO C O KAWASAKI ST;NOGAMI TAKESHI C O KAWASAKI ST;MATSUKAWA NAOKI C O KAWASAKI S
分类号 H01L21/768;H01L23/532 主分类号 H01L21/768
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