| 摘要 |
PURPOSE:To perform plotting without using a mask for exposure printing and to accelerate plotting speed by providing a means to split a laser beam to plural luminous flux, a light modulator to supply plotting information to each split plotting luminous flux, and a light synthesizing means. CONSTITUTION:A laser beam L1 emitted from a laser device 12 is split to luminous flux L2, L3 for plotting by a half prism 16. Furthermore, the luminous flux L2, L3 are split to eight luminous flux L5, L6 set in parallel with a main scanning direction X to each other by beam separators 21, 22. An acoustic optical devices (light modulators) 86, 37 are turned on/off based on prescribed data, respectively, and supply the plotting information for turning-on/off to the luminous flux for split plotting of the luminous flux L5, L6. After that, the luminous flux for split plotting of the luminous flux L5, L6 are combined sequentially by a polarization beam splitter 40, and are synthesized so as to be set in a line in parallel with the main scanning direction X, then, they are made incident on a polygon mirror 46. |
