发明名称 EQUIPMENT AND METHOD FOR WIRE BONDING
摘要 PURPOSE:To provide an apparatus and a method for wire bonding wherein positional information such as coordinates that is preliminarily stored in a bonding equipment can be made effective use of as it is. CONSTITUTION:According to the instruction from a control unit 13, a first or a second bonding point which is to be a section to be bonded is photographed by a camera 1 and it is inspected whether a bonded impression exists or not at a specified place and/or in a specified range around the specified place.
申请公布号 JPH0737924(A) 申请公布日期 1995.02.07
申请号 JP19930199236 申请日期 1993.07.16
申请人 KAIJO CORP 发明人 NISHIMAKI KOUJI;KAMIHARASHI TAKASHI
分类号 H01L21/60;H01L21/00;H01L21/607 主分类号 H01L21/60
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