METHOD OF STACKING UPPER LAYER THIN FILM OVER OXIDE SUPERCONDUCTING THIN FILM

摘要

PURPOSE:To form a thin film of good crystallinity through formation of a good interface by making the substrate temperature in forming a non- superconducting film and insulator film under the maximum temperature not adversely affecting mutual diffusion and over the minimum temperature by which the crystalline thin film grows. CONSTITUTION:In stacking an SrTiO3 thin film over a Y1Ba2Cu3O7-x oxide superconducting thin film, film-forming is made at a substrate temperature lower than a temperature by which mutual diffusion occurs in an interface. Also, an Au thin film which is to be further stacked over this SrTiO3 thin film is formed at a substrate temperature by which a mutual diffusion does not occur between the Y1Ba2Cu3O7-x oxide film and the SrTiO3 thin film. Consequently, very little mutual diffusion in the interface occurs, thus forming a sharp interface.