STAGE POSITIONING CONTROL METHOD

摘要

PURPOSE:To always execute an optimum positioning method by necessarily satisfying function required by each positioning command. CONSTITUTION:A stage controller 10 is provided with a driving mode control unit 11 whereto control process information ICP and command position information IP are sent from a command unit 20 and a driving control unit 12 which drives each shaft of a stage part in accordance with driving shaft information IA, driving method information IM and command position information IP sent from the driving mode control unit 11. The driving mode control unit 11 has a driving mode table 111 wherein a plurality of driving modes are set in accordance with function required by positioning command of a stage.