| 摘要 |
PURPOSE:To dispense with the exchange of a washer and to perform the adjustment of three axes easily and in a short time in the position adjustment of an optical device which comprises an optical system. CONSTITUTION:A holding member 3 which holds the optical device M is arranged on a movable member 2 provided with a placing plane 2A inclined to a prescribed reference plane. Also, fixing members (4a-4d, 5a-5d) can be switched to a first state where the movable member 2 and the holding member 3 are fixed integrally and a second state where they can be moved relatively. First driving means(6, 23c) drive the movable member 2 in a prescribed direction within the reference plane when the second state is set, and second driving means (7, 8, 23a, 23b) drive the holding member 3 in the prescribed direction within the reference plane when the first state is set, and also, supply a prescribed pressing force to the holding member 3 so as to move the holding member 3 only in a direction perpendicular to the reference plane when the first driving means (6, 23c) drive the movable member 2 in the prescribed direction. |
