| 摘要 |
PURPOSE:To provide a low-dielectric constant glass ceramic board, in which a thermal expansion coefficient can be controlled and the board can be baked at low temperature, along with good adhesive force with a copper metallized part. CONSTITUTION:A glass ceramic board contains a glass element including a borosilicate glass, 3 to 12wt.% quartz as a ceramic filler, and 2 to 5wt.% alumina. A generated cristobalite phase is 0.1 to 2wt.%. In a productive step, a mixture of 38 to 70wt.% borosilicate glass, 25 to 55wt.% quartz glass, in which an impurity element other than alumina is 200ppm or below, 3 to 12wt.% quartz, and 2 to 5wt.% alumina is baked at a temperature of 900 to 1050 deg.C. |
