| 摘要 |
PURPOSE:To increase the allowance for exposure and PEB (heating after exposure) and to enable high sensitivity by using such a dye stuff that may have a tertiary amino group as an auxochrome in the molecule. CONSTITUTION:This photosensitive resin compsn. contains an alkali-soluble resin, photoacid producing agent, crosslinking agent, and dye stuff. The dye stuff may have a tertiary amino group as a substituent in the molecule. This dye stuff which may have a tertiary amine as an auxochrome in the molecule in such a dye stuff may have a tertiary amino group as an auxochrome but does not have primary or secondary amino group. By using this dye stuff which may have a tertiary amino group as an auxochrome in the molecule, trapping of acid produced during exposure by primary or secondary amino groups is not caused so that rapid decrease in sensitivity is prevented. As for the auxochrome, for example, hydroxy groups, alkyl- or aryl-substd. hydroxy groups, mercapto group, sulfo groups, carboxyl groups, and halogen atoms can be used. |
