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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH0737544(A)
申请公布日期
1995.02.07
申请号
JP19930178944
申请日期
1993.07.20
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
KUWABARA HAJIME
分类号
C23C14/48;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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