发明名称 SOLID-STATE IMAGING DEVICE AND PREPARATION THEREOF
摘要 PURPOSE:To enable the simple and easy prevention of troubles due to the con tact of adjacent bumps, by forming recesses outside the photoelectric converting region on a first semiconductor substrate, and forming projections to be fitted into the recesses, outside the signal processing region on a second semiconductor substrate. CONSTITUTION:Photodiode(s) 1a are formed in one- or two-dimensional arrangement on a first semiconductor substrate 2 to form a photoelectric converting region 1 where incident light is converted into current. Input diode(s) 5a are placed in one-or two-dimensional arrangement on a second semiconductor substrate 6 to form a signal processing region 5 where the signals converted in the photoelectric converting region are read. Recesses 4 or projections are formed in the area other than the photoelectric converting region 1 on the first semiconductor substrate 2. Projections 8 or recesses to be fitted onto/into the recesses 4 or projections, are formed in the area other than the signal processing region 5 on the second semiconductor substrate 6. This makes it possible to prevent horizontal displacement that might occur when bonding bumps by press.
申请公布号 JPH0738076(A) 申请公布日期 1995.02.07
申请号 JP19930178943 申请日期 1993.07.20
申请人 FUJITSU LTD 发明人 SUDO HAJIME;KAJIWARA NOBUYUKI;ARINAGA KENJI;FUJIWARA KOJI;NAKAMURA HIROKO
分类号 C23F4/00;H01L21/321;H01L21/60;H01L27/146 主分类号 C23F4/00
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