| 摘要 |
PURPOSE:To easily perform the adjusting work of plural luminous flux for plotting by providing a means to rotate the luminous flux for plotting, a means to shift it in a main scanning direction. and a means to shift it in a sub scanning direction. CONSTITUTION:A laser device 12 irradiates a laser beam L1, and split luminous flux L5, L6 for plotting are exposed on a CCD set on a plotting table plane T. Such adjustment to set the luminous flux L5 in parallel with the luminous flux L6 is performed by rocking a beam separator 21 as observing a plotted image detected by the CCD, and rotating the luminous flux 5. Furthermore, the luminous flux L5 is shifted in the main scanning direction X by sliding convergence optical systems 26, 31 for pitch conversion in the main scanning direction of a polygon mirror 46. Also, the luminous flux L5 is shifted in the sub scanning direction Y by sliding a polarization beam splitter 40 in the sub scanning direction Y. In this way, adjustment so as to arrange the spots of the luminous flux L5, L6 at appropriate pitch, respectively is performed. |
