ETCHING OF ORGANIC FILM,申请号JP19930183113-传众专利搜索

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发明名称	ETCHING OF ORGANIC FILM
摘要
申请公布号	JPH0737865(A)	申请公布日期	1995.02.07
申请号	JP19930183113	申请日期	1993.07.26
申请人	NEC CORP	发明人	IGAWA EIJI
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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