PRODUCTION OF QUARTZ GLASS FILM

摘要

PURPOSE:To produce a high quality quartz glass film by a sol-gel processing method. CONSTITUTION:Metal alkoxides including silicon alkoxide as the principal component are hydrolyzed, a sol is prepd. by a polycondensation reaction which takes place simultaneously with the hydrolysis and an optical waveguide with a quartz glass film produced from the sol is produced. At this time, the sol is kept at 30-100 deg.C and cured for a time corresponding to 20-80% of the gelling time of the sol at, the temp., the top of a substrate is coated with the cured sol and this sol is dried and heated to produce the objective silica-based glass film on the top of the substrate.