| 摘要 |
PURPOSE:To precisely recognize an edge shape by jointly using a rectangle measuring method and a density picture method, producing the height of an edge with a result by the rectangle surveying method and producing the outline of the edge with a result by the density picture method. CONSTITUTION:When a surface shape is obtained by the rectangle surveying method for an object 1 having a vertical surface 1c between a higher surface 1a and a lower surface 1b, an edge 1d that higher surface 1a and the vertical surface 1c makes, really ought to have the outline in a broken line position in the drawing (b), in the rectangle surveying method, however, since a system skips when point data of one survey point p1 is obtained and point data of a next survey point p2 is obtained, the outline becomes a vague one having width W, but the height position is precise. On the other hand, since a clear density change appears in the broken line position of the drawing (b) in the density picture method, the part can be judged to be the outline of the edge 1d. Therefore, the rectangle surveying method and the density picture method are jointly used and the height position is produced in the former and an outline position in the latter. |
